Four-quadrant gratings moiré fringe alignment measurement in proximity lithography
نویسندگان
چکیده
منابع مشابه
Sub-20-nm alignment in nanoimprint lithography using Moiré fringe.
Accurate multi-level overlay capability for nanoimprint lithography (NIL) is essential to integrated circuit manufacturing and other multilayer imprint applications. Using the "beat" grating image (Moiré fringe) generated by overlaying two sets of gratings that have slightly different periods, we obtained an alignment signal with a sensitivity better than 10 nm in nanoimprint lithography. The a...
متن کاملMoiré Nanosphere Lithography.
We have developed moiré nanosphere lithography (M-NSL), which incorporates in-plane rotation between neighboring monolayers, to extend the patterning capability of conventional nanosphere lithography (NSL). NSL, which uses self-assembled layers of monodisperse micro/nanospheres as masks, is a low-cost, scalable nanofabrication technique and has been widely employed to fabricate various nanopart...
متن کامل16 Moiré and Fringe Projection Techniques
The term “moiré” is not the name of a person; in fact, it is a French word referring to “an irregular wavy finish usually produced on a fabric by pressing between engraved rollers” (Webster's 1981). In optics it refers to a beat pattern produced between two gratings of approximately equal spacing. It can be seen in everyday things such as the overlapping of two window screens, the rescreening o...
متن کاملTunable multiband metasurfaces by moiré nanosphere lithography.
Moiré nanosphere lithography (MNSL), which features the relative in-plane rotation between two layers of self-assembled monodisperse nanospheres as masks, provides a cost-effective approach for creating moiré patterns on generic substrates. In this work, we experimentally and numerically investigate a series of moiré metasurfaces by MNSL. Due to the variety of gradient plasmonic nanostructures ...
متن کاملAutomatic processing in moiré deflectometry by local fringe direction calculation.
An algorithm for accurately extracting the local fringe direction is presented. The algorithm estimates, in the neighborhood of n x n points, the direction of the gradient that points normal to the local fringe direction. The performance of four different derivative kernels is also compared. Since this method is sensitive to noise and variations in background and amplitude, a preprocessing step...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2013
ISSN: 1094-4087
DOI: 10.1364/oe.21.003463